Sub-Projects - SP12

X-RAY METROLOGY

Short Description

  • Assessment of the latest generation X-ray metrology D8 FABLINE from Bruker AXS
  • Assessment of high Brightness X-ray source for MicroHRXD

Advances Proposed in SP12

  • Availability of high brightness X-ray sources which will result in an improvement in throughput of a factor of ~ 10
  • Improved usability and algorithms targeted to advanced materials, photonics, and their heterogeneous integration
  • Complete prototype
  • Improved analytical software for HRXRD