Sub-Projects - SP07

450MM DEFECTS METROLOGY FOR PROCESS AND MATERIALS CHARACTERIZATION AND QUALIFICATION

Short Description

  • The subproject aims to evaluate 450mm defects metrology for process and materials characterization and qualification

Advances Proposed in SP07

  • An assessment of novel EDX module integration with AMIL’s defect review tool
  • 450mm and 300mm material analysis defectivity protocol for imec’ s 10nm technology node pilot line
  • Material analysis base line creation for process tools qualification