Sub-Projects - SP06

VACUUM TRANSPORTATION INTERFACE FOR 450MM ARCHITECTURE

Short Description

  • Assessment of Vacuum transportation interface for 450mm architecture
  • Studies of this new Handling concept for advanced equipment/fab architecture

Advances Proposed in SP06

  • Development & manufacturing of 450mm carrier and interface
  • Attachment of the system to the 300/450mm cluster at FhG IISB
  • Assessment of the tool/process in this 300/450mm cluster platform