ADVANCED BATCH PROCESSING
- Assessment of a 450mm Batch Oxidation System for 14nm technology node and beyond
- Prove general ability for future 450mm production requirements
- Characterize and understand behaviour of 450mm wafers in thermal processing
Advances Proposed in SP04
- Prove general ability of 450mm Batch Oxidation System for future 450mm production requirements in G450C pilot line, with respect to process capability, repeatability, cleanliness, equipment reliability, physical tool performance and system internal contamination
- Specific improvements are expected in the areas of reduction of logistics overhead time, contamination performance, efficient mini-environment purging, and isolation and uniform heat distribution of heating element and flange area.
- After validation several of the expected improvements can be considered for 300mm batch equipment